EFFECT OF THE N2/Ar FLOW RATIO ON THE MICROSTRUCTURE AND MECHANICAL PROPERTIES OF TiSiCN COATINGS

Jin Wang; Mengting Wang; Yongqiang Wang; Dayan Ma; Hao Li

doi:10.17222/mit.2021.213

Jin Wang School of Mechanical and Automotive Engineering; Qingdao University of Technology, Qingdao 266520
Mengting Wang School of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China
Yongqiang Wang School of Mechanical and Automotive Engineering, Qingdao University of Technology, Qingdao 266520, China
Dayan Ma School of Materials, Xi’an Jiaotong University, Xian 710000, China
Hao Li School of Materials, Xi’an Jiaotong University, Xian 710000, China

DOI: https://doi.org/10.17222/mit.2021.213

Keywords: TiSiCN; multi-arc ion plating, magnetron sputtering, N2/Ar flow ratio, mechanical properties, tribological properties

Abstract

TiSiCN coatings were prepared with the multi-arc ion plating and magnetron sputtering technique. The effect of the N₂/Ar flow ratio on the properties of TiSiCN coatings was studied using scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and a friction and wear tester (UMT-3). With an increase in the N₂/Ar flow ratio, the number of large particles on the surface first increases and then decreases. The intensity of the TiN (200) diffraction peak increases gradually, while the grain size first decreases and then increases. A TiSiCN coating consists of Ti (N, C) nanocrystallites, amorphous SiC, Si₃N₄ and carbon. When the N₂/Ar flow ratio is 5 : 1, the coating exhibits the highest hardness and excellent wear resistance.

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